A microfluidic system with embedded acoustic wave sensor for in situ detection of dynamic fluidic properties

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TitleA microfluidic system with embedded acoustic wave sensor for in situ detection of dynamic fluidic properties
Publication TypeJournal Article
Year of Publication2010
AuthorsZhang, K, Zhao LB, Guo SS, Shi BX, Chen Y, Chan HLW, Wang Y
JournalMicroelectronic Engineering
Volume87
Issue4
Pagination658-662
Date PublishedApr
ISBN Number0167-9317
Accession NumberISI:000275264200025
Abstract

A microfluidic system with acoustic wave sensor employing quartz crystal microbalance embedded in the microfluidic channel was developed by soft-lithography technique and characterized by measuring resonance frequency of the sensor under different service conditions. Detections of dynamic fluids in various concentrations and flow rates showed that shift of resonant frequency was observed when there was variation in mass or viscosity of the fluid passing through the microchannels. Through a calibration experiment by monitoring continuous flowing fluids with suspended microparticles, the sensitivity of the system was found to be similar to 15 Hz cm(2)/ng. All these results suggest that the microfluidic system can be employed in in situ monitoring of chemical and biochemical processes involving mass and/or viscosity changes within the microfluidic system. (C) 2009 Elsevier B.V. All rights reserved.

URL<Go to ISI>://000275264200025
DOI10.1016/j.mee.2009.09.008
Short TitleA microfluidic system with embedded acoustic wave sensor for in situ detection of dynamic fluidic properties
Unit: 
UMR 8640