Actualités
Prix et distinctions
Prof. JULLIEN Ludovic
Professeurs invités
BONELLA Sara
Physics department, University Rome 1 "La Sapienza"
MIRKIN Michael
Queens College - Department of chemistry and Biochemistry - New York - USA
HALLE Bertil
Université de Lund - Suède
Dernière publication
Bousquet, David, Coudert François-Xavier, Fossati Alexandre G. J., Neimark Alexander V., Fuchs Alain H., and Boutin Anne
The Journal of Chemical Physics,
Volume 138,
p. 174706,
2013
Accueil Publications Micro-pressure sensor made of conductive PDMS for microfluidic applications
Micro-pressure sensor made of conductive PDMS for microfluidic applications
| Titre | Micro-pressure sensor made of conductive PDMS for microfluidic applications |
| Type de publication | Journal Article |
| Nouvelles publications | 2010 |
| Auteurs | Li, H, Luo CX, Ji H, Ouyang Q, Chen Y |
| Journal | Microelectronic Engineering |
| Volume | 87 |
| Fascicule | 5-8 |
| Pagination | 1266-1269 |
| Année de publication | May-Aug |
| Numéro | 0167-9317 |
| Accession Number | ISI:000276300700147 |
| Résumé | We report on results of fabrication and characterization of a conductive gel based pressure sensor which can be easily integrated into the commonly used microfluidic devices. The gel elements of the sensor are obtained by casting a viscous mixture of polydimethylsiloxane (PDMS) and metal powders on a patterned template. After solidification, the gel becomes conductive, showing piezoresistive effects that can be used for low pressure sensing. Our fabrication process of the gel elements is fully compatible to the integration requirement of multi-functional PDMS devices and the fabricated pressure sensors can be repeatedly used with direct current readout. (C) 2009 Elsevier B.V. All rights reserved. |
| URL | <Go to ISI>://000276300700147 |
| DOI | 10.1016/j.mee.2009.11.005 |
| Importer un fichier | Micro-pressure sensor made of conductive PDMS for microfluidic applications |